Question

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本文介绍以15%Pb过量Pb(Zr0.4Ti0.6)O3前驱体溶液为原料，利用溶胶-凝胶法制备PZT薄膜。将锆钛酸铅前驱体溶液涂布于基片的表面，以500 r/min的速度旋转6s，然后经过4000r/min高速旋转40s。使锆钛酸铅前驱体溶液均匀的分布在PT基片上，将匀胶后的湿膜在板式炉中烘烤一定时间，使有机物分解、挥发。重复匀胶、烘烤5-6次会形成非晶的PZT薄膜。然后将非晶的PZT薄膜在不同含氧量混合气体的环境中退火。得到在不同氧气气氛下退火的Pt/PZT/Pt薄膜样品，对样品使用D/max-PC2500型X射线衍射仪研究其微观结构，并且利用Radiant Technologies. Inc生产的铁电测试仪对样品PT/PZT/PT进行了电学性能的测量。在利用溶胶-凝胶法制备高质量的PZT薄膜，需要注意两点，一是在匀胶过程中选择合理的匀胶速度和时间。二是控制退火时候的温度。

Answer 1

This article introduces the 15% Pb excess Pb (Zr0.4Ti0.6) O3 precursor solution as raw materials, by sol - gel PZT thin films. The PZT precursor solution coated on the surface of the substrate to 500 r / min rotational speed of 6s, and then after 4000r/min high speed 40s. To PZT precursor solution evenly distributed in the PT substrate, will absorb the wet glue membrane after baking in the furnace plate some time, so that organic matter decomposition, volatilization. Repeat uniform plastic, baked 5-6 times will form amorphous PZT film. Then the amorphous PZT films at different oxygen gas mixture in the annealing environment. Get the oxygen atmosphere at different annealing Pt / PZT / Pt thin films on the sample using D/max-PC2500 X-ray diffraction to study the microscopic structure, and use of Radiant Technologies. Inc production samples of ferroelectric tester PT / PZT / PT for the measurement of electrical properties. In the use of sol - gel PZT thin films of high quality, attention to two points, first, the process of selection in the uniform plastic glue evenly reasonable speed and time. Second, control the temperature of annealing time.