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平面光学零件光学平行度现代测试技术研究摘要科研工作中常用到各种平行度很高的光学件,例如研究频率用的法布里——珀洛标准具必须具有二十分之一波长的平行度,因此,如何在加工过程...
平面光学零件光学平行度现代测试技术研究摘要 科研工作中常用到各种平行度很高的光学件,例如研究频率用的法布里——珀洛标准具必须具有二十分之一波长的平行度,因此,如何在加工过程中方便准确的测量光学件的平行度(微小楔角)不仅是光学工艺常需要解决的问题,也关系到其光学系统的光学性能和成像质量的保障。激光点光源干涉法是利用氦氖激光的良好相干性,简易地实现由被测件(例如平板玻璃)前后两表面反射而产生的两点光源干涉现象,通过测量干涉圆环中心的偏移量,间接求出被测件两表面平行差的测量方法。该方法简单易行,既使在车间条件下,也可以达到 左右的测量精度,而且对零件的形状、大小等均无严格要求,是一种高精度精准、便捷的测量方法。 关键词:平面光学零件 光学平行度 激光点光源干涉法
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Plane optical parts optical parallelism of modern testing technology research abstract the scientific research work in used to all kinds of parallel degree of very high optical components, such as study of frequency with Fabri -- Tupelo etalon must have 1/20 wavelength parallel degree, therefore, how the process is convenient and accurate measurement of the optical piece parallelism ( small wedge angle ) is not only the optical process often need to solve the problem, but also related to the optical system of the optical performance and image quality guarantee. Laser interference method is the use of helium neon laser good coherence, easy to realize by the sample ( e.g. glass) before and after the two reflective surface and the two light interference phenomenon, through measuring circle center offset, indirectly calculated measured two surface parallel difference measuring method. The method is simple and feasible, even in workshop conditions, can also achieve the right measurement accuracy, but also to parts of the shape, size and no strict requirements, is a kind of high accuracy precision, convenient measuring method. Key words: plane optical parts optical parallelism laser interference method 采纳 采纳
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Plane optical parts optical parallelism of modern testing technology research abstract the scientific research work in used to all kinds of parallel degree of very high optical components, such as study of frequency with Fabri -- Tupelo etalon must have 1/20 wavelength parallel degree, therefore, how the process is convenient and accurate measurement of the optical piece parallelism ( small wedge angle ) is not only the optical process often need to solve the problem, but also related to the optical system of the optical performance and image quality guarantee. Laser interference method is the use of helium neon laser good coherence, easy to realize by the sample ( e.g. glass) before and after the two reflective surface and the two light interference phenomenon, through measuring circle center offset, indirectly calculated measured two surface parallel difference measuring method. The method is simple and feasible, even in workshop conditions, can also achieve the right measurement accuracy, but also to parts of the shape, size and no strict requirements, is a kind of high accuracy precision, convenient measuring method. Key words: plane optical parts optical parallelism laser interference method
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